基于单幅数字散斑投影及图像相关的离面振动测量

采用单幅数字散斑图投影及高速数字图像采集技术,研究了动态离面位移的测量。采用商用液晶投影仪将计算机产生的模拟散斑图投影到待测动态变形物体表面,由高速数字图像采集设备摄取并保存变形散斑图,采用时间序列数字图像相关软件计算出物体表面各点随时间变化的离面位移。这种方法用于振动分析时不仅可以获得振型分布,而且还可以获得各点的振幅值。与现有的激光频闪照相测振及激光多普勒测振等方法相比,具有光学系统简单,可全场定量测量。悬臂梁振动实验结果证实了该方法的有效性。     

一种可实现薄膜厚度在线测量的方法

介绍了一种测量固体薄膜厚度的光学方法。该方法具有测量速度快、可实现在线测量等特点。为解决薄膜生产过程中厚度在线检测问题,构造了一套软硬件实验系统,利用该系统进行实验的结果表明:在10~100μm厚度范围,测量误差小于10%,满足实际生产需要。     

基于数字图像处理方法的焦距测量技术研究

介绍了基于数字图像处理方法测量透镜焦距的玻罗板分划线快速自动甄别法。该图像处理方法鲁棒性好,采用Canny法进行分划线边缘检测。用重心法计算所有线条的重心,从重心往两边搜索线条,判断选取间隔大的刻划线对,可以提高测量精度。实验数据表明该方法的相对测量不确定度能达到8.5×10-4。为实现以数字图象处理为基础的焦距客观测量提供了一种可行的技术途径。     

双频氦氖激光回馈位移测量系统的实验与应用研究

研究了一种全新的纳米尺度位移测量系统。将双折射元件插入He-Ne激光器谐振腔内产生频率分裂效应，使原本单模谐振的激光器输出变成了频差可调的2个正交偏振频率（o光和e光），而形成双频激光器。在激光谐振腔外放置沿激光轴线位移的反射表面，将输出的激光束反射回腔内，以便对激光的光强进行调制，可实现高分辨率非接触式可判向位移测量。提出了一种细分方法，该方法突破了传统干涉系统的衍射极限（1/2波长）。对于633nm波长He-Ne激光，本系统的理想分辨率为1/8波长（约为79nm）。     

一种新型双参量光纤布喇格光栅传感器的研制

介绍了一种新型的具有双参量测量功能的光纤布喇格光栅传感器.该传感器采用了特殊的结构,安装了两个不同中心波长的光纤布喇格光栅,可以实现两曲面之间狭小间隙的微小位移和温度的同时测量.实验表明,该传感器结构紧凑、体积小,具有良好的重复性和稳定性,位移测量误差不超过±10 μm,温度测量误差不超过±2℃.     

迈克尔逊风场干涉仪基准光程差及步长误差容限分析

迈克尔逊干涉仪风场探测是在一定的基准光程差的基础上,通过动镜步进或四分区镀膜的方法,获得一个波长范围内步进间隔为λ/4的四步干涉强度.在此过程中存在的基准光程差误差及步长误差将对结果产生影响.对在一定的结果不确定度允许范围内的误差变量的容限值进行了讨论.在可以预知的误差存在情况下的精确结果的得出给出了计算方法.     

Thin film stress measurement by instrumented optical fibre displacement sensor

Residual stress can adversely affect the mechanical, electronic, optical and magnetic properties of thin films. This work describes a simple stress measurement instrument based on the bending beam method together with a sensitive non-contact fibre optical displacement sensor. The fibre optical displacement sensor is interfaced to a computer and a Labview programme enables film stress to be determined from changes in the radius of curvature of the film-substrate system. The stress measurement instrument was tested for two different kinds of thin film, hard amorphous carbon nitride (CN) and soft copper (Cu) films on silicon substrates deposited by RF magnetron sputtering. Residual stress developed in 500 nm thick CN thin films deposited at substrate temperatures in the range 50-550 °C was examined and it was found that stress in CN films decreased from 0.83 to 0.44 GPa compressive with increase of substrate temperature. Residual stress was found to be tensile (121 MPa) for Cu films of thickness 1500 nm deposited at room temperature.     

Holographic vibration measurements of rough surfaces using a LCSLM

This paper describes measurements of a vibrating object with rough surface by the time-averaged method of holography using a newly designed optically addressed liquid crystal spatial light modulator with a resolution of 102 lp/mm and a diffraction efficiency of 16%. An object vibrating faster than several tens of Hz could be visualized. The pattern obtained by the method provides the locus of vibrating nodes. The advantage of this method is that a high contrast pattern of a vibrating object can be imaged in near-real-time, although the sensitivity of vibration is decreased.     

Neural network applied to reconstruction of complex objects based on fringe projection

The neural network has been introduced into the reconstruction of the complex object based on fringe projection. In this method, the neural network with powerful property of approximation is used to get the continuous approximate function of a discrete fringe pattern captured by an image frame grabber. The depth-related phase of the measured object modulated into the fringe pattern can be demodulated by dealing with the approximate function. Compared with the Fourier transform profilometry (FTP), in the network method, one deformed fringe pattern is needed to reconstruct the tested object, and a high spatial resolution is maintained for no filtering process. Therefore, this method performs better than FTP in the measurement of the complex object. Moreover, the network method is capable of demodulating more depth-related phase even in the case that the local shadow exists in the fringe pattern. Computer simulations and experiments validate the feasibility of this method.     

可调谐二极管激光吸收光谱法测量气体温度

研究了一种新型的非接触式测温技术——可调谐二极管激光吸收光谱(TDLAS)测温技术。介绍了温度测量及调制吸收光谱技术原理,分析了调制幅度对气体温度测量的影响。优选了氧气吸收谱线对13163.78 cm-1和13164.18 cm-1,在搭建的高温实验系统上,实现了气体温度和浓度的同时测量。通过分析实测波形获得了谱线13164.18 cm-1在823~1323 K温度范围内的碰撞展宽系数和温度指数。实验结果表明,在823~1323 K温度范围内,系统温度测量的线性误差为0.65%,最大波动为±15 K。